StayClean-F

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First found May 22, 2018

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Water-soluble Additive
StayClean-F
Prevents pad corrosion during dicing
Pad corrosion prevention
For workpieces that have a long cut time, such as a workpiece with a small die size
and a large diameter, corrosion may occur on the bonding pad due to prolonged
exposure to the cutting water. By using StayClean-F, it prevents corrosion due to
the formation of an ultra-thin barrier layer on the surface of the workpiece.
■Pad corrosion prevention result
Particle adhesion prevention
By using the additive agent StayClean-F, it separates particles from the
workpiece surface and prevents adhesion of particles that can not be removed
with the spinner wash after dicing.
Low environmental load/Low running cost
StayClean-F can be used in the same environment* as normal dicing and does
not include any regulated chemical, such as substances covered under the
RoHS directive or PFOS. Furthermore, since StayClean-F can be used even at
diluted concentrations of one part per thousand, and in particular at one part per
ten thousand to prevent corrosion, the running costs are low.
When using StayClean-F
Deionized water
■Particle adhesion prevention result
*If the cutting water is being recirculated, contact your DISCO sales representative.
When using StayClean-F
Deionized water
StayClean-F
Particle
H 2O
Water-soluble Additive
Cutting Water
StayClean-F
H 2O
Si
H 2O
Si
H 2O
H 2O
AI2O3
Al
Si
■Mechanism
[1]The components of StayClean-F form a barrier layer on the workpiece and this
prevents pad corrosion and particle adhesion.
[2]The components of StayClean-F are removed in the spinner wash process.
The same level of process results as when not used can be expected
Even if StayClean-F is added, the processing results are the same as for
deionized water.
StayClean-F
Solution appearance
-
Transparent colorless liquid
0.50
Main ingredient
-
Water-soluble polymer macromolecule
0.46
Density (15 degrees C)
Blade life comparison
(µm)
Wear amount per 1 m
StayClean-F Specification
pH (undiluted)
0.42
0.38
pH
4.7
g/cm3
1.03
Residue/decomposition
(when diluted 1000 times)
mg/L
COD 32 (JIS K1002-17)
mg/L
BOD 2.5 (JIS K0102-21)
Recommended dilution
times
1,000 - 10,000 (0.1 - 0.01 %)
StayClean Injector
0.34
Power supply, voltage
0.30
Supply water pressure
Supply water temperature
Deionized water only
StayClean
Process flow rate
20 - 25
MPa
0.2 - 0.5
Chipping comparison
Chipping size
18
16
14
12
10
8
6
4
2
0
Average+3sigma
Average
Machine dimensions
(WxDxH)
Machine weight
2 - 20
L/min
Additive injection rate
(µm)
AC90 - 230 Single phase 50/60 Hz
V
deg C
0.1 - 0.01 (1,000 - 100 ppm)
%
mm
Injector
200 x 300 x 500 excluding projections
Bottle stocker 357 x 392 x 440 excluding projections
kg
Injector
Approximately 22 (When dry)
Bottle stocker Approximately 10 (When dry)
Cautions before using StayClean-F
•Make sure to read the MSDS before using StayClean-F because it describes detailed care
regarding its use.
•Do not use StayClean-F for any unintended use.
Cautions regarding the use of StayClean-F
•Take care not to touch your eyes or skin, wear appropriate protective equipment such as
gloves and glasses when handling it.
•Avoid using it in conjunction with other chemical agents (in particular strong acids or strong
alkalines).
Deionized water only
Workpiece: Si wafer
Blade: NBC-ZH
StayClean
Cautions regarding StayClean-F storage
(min-1)
Spindle rpm: 40,000
Feed speed: 60 mm/s
•Avoid exposure to direct sunlight and store in a cool dark place. Do not place it in a freezer.
•Seal the container properly and then store it.
•With the container still sealed, the warranty period is one year from the date of manufacture.
StayClean Injector
Using the injector developed exclusively for StayClean, stable supply is possible even at diluted concentrations of one part per thousand or more.
(Conforms to the CE marking)
Dicing saw
StayClean Injector
Cutting Water
Pure water
pipe
Discharged
water
Spinner cleaning Water
13-11 Omori-Kita 2-chome, Ota-ku, Tokyo 143-8580, Japan
Phone: 03-4590-1100 Fax: 03-4590-1075 • www.disco.co.jp
2010.12
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